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Patents
Patents
EM Nanometrology Team
| No | Name of Patent | Application Date |
|---|---|---|
| 11087952 | Linear Structure For Displacement Transmission, and One-Dimensional and Three-Dimensional Micro Movement Device Using Same | 2021-08-10 |
| 10-1979290 | Apparatus and Method for Measuring Quantity of Heat for Natural Gas | 2019-05-10 |
| 10283339 | PARTICLE BEAM MASS SPECTROMETER AND PARTICLE MEASUREMENT METHOD BY MEANS OF SAME | 2019-05-07 |
| 9939461 | Head-integrated atomic force microscope and composite microscope including same | 2018-04-10 |
| 10-1787431 | Linear structure for transferring displacement and 1-dimensional and 3-dimensional fine scanner using the same | 2017-10-12 |
| 10-1675489 | Atomic force microscope with integrated head and fusion microscope including the same | 2016-11-07 |
| 10-1663740 | Laser Scattering Particle Analysis Apparatus and Analysis Method Of The Same | 2016-09-30 |