Advanced Instrumentation Institute

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Developing world-class advanced instrumentation based on measurement technology.

The Advanced Instrumentation Institute implements the world-class measurement technologies of KRISS by developing highly advanced instrumentation according to meet the ever-changing industrial demand. Using the infrastructure we have in place, our institute supports the instrumental application of measurement technology while also managing a performance evaluation platform.

Director: Dr. Sang Woo Kang (

Semiconductor Integrated Metrology Team

The Semiconductor Measurement Instrumentation Team develops high-precision, real-time process diagnosis sensors, measurement analysis instruments based on optical measurement technology, and integrated metrological technology for process equipment and measuring instruments with the goal of overcoming the measurement limitations of next-generation semiconductor manufacturing processes. The team has established an organic industry-academia collaboration system with industries related to semiconductors (device, equipment, sensor, framework companies etc.) as well as other academia and research institutes to ensure the success of development projects.

Its current R&D project include the following subjects :

  • • Development of (flat-plate) wafer-type sensors for semiconductor process equipment diagnosis
  • • Development of optical measurement sensors and integrated instruments for semiconductor processes
  • • Development of high-precision measurement instrumentation for semiconductor process equipment TTTM (tool to tool matching)
  • • Development of performance and reliability measurement technologies for material parts of semiconductor process equipment and construction of a test bed

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Optical Imaging Metrology Team

The Optical Imaging Metrology Team develops active/intelligent smart source technology for optical imaging measurement to meet the needs of future industries and the advanced defense industry. The team's goals also encompass the commercialization and demonstration of world-class optical imaging measuring instruments, the establishment of high value-added next-generation measurement standardization, and the dissemination of technology into industries. The team also collaborates with domestic and overseas industry, academic, and research experts from various fields to become a world-leading optical imaging metrology group.

Its current R&D project include the following subjects :

  • • Development of 3D analysis/measurement technology for complex free-form surfaces and nano-devices with multi-layer films
  • • Development of super-resolution/wide-field imaging measurement technology below the diffraction limit.
  • • Development of dual-use adaptive optical systems, laser weapon systems, and high-resolution optical imaging equipment
  • • Development of measurement technology and standards for the optical properties of virtual/augmented reality devices

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Space Optics Team

The Space Optics Team aims to develop exciting optical systems that are used in the fields of astronomy, space science, and advanced science from cameras installed on artificial satellites and reflecting mirrors in ground-based astronomical telescopes to extreme ultra-violent high-precision reflecting mirrors for synchrotron radiation accelerators. As a notable example, the team developed the first domestically produced reflecting mirror for satellites. The team, which is comprised of experts from various fields, actively collaborates with both domestic and overseas industry, academic, and research experts to research and develop unexplored high value-added optical systems.

Its current R&D project include the following subjects :

  • • Development of high-resolution imaging sensor systems for space use
  • • Development of ground-based optical systems for use in extreme environments
  • • Development of measurement and manufacturing technology for high-precision optical parts with large diameters
  • • Measurement/Calibration of large plane, free-form, and aspherical surfaces

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Scientific Instruments Platform Team

The Scientific Instruments Platform Team aims to develop evaluation platform of hardware and software performance, enhancing competitiveness and reliability of domestic scientific instruments, based on the scientific instrumentation and measurement/standard technology accumulated by KRISS. Testing and evaluation procedures are established based on the developed platform. Furthermore, the team actively collaborates with those in the industry, academia, and research fields to disseminate the platform and provide related support.

Its current R&D project include the following subjects :

  • • Development of core constituent technology and parts/modules for scientific instruments
  • • Development of measurement/analysis algorithms and software for scientific instruments
  • • Development of a scientific instruments hardware/software reliability and performance evaluation platform
  • • Development of reliability and performance evaluation testing procedures based on metrological traceability chains

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Laser Nanoprocess Equipment Team

The Laser Nanoprocess Instrumentation Team is working to develop femtosecond laser nanoprocess technology and equipment to develop high-speed laser-based nanoprocess equipment with high-precision, high-speed optical measurement instrumentation. In contrast to existing wet processes, femtosecond laser-based nanoprocesses can be implemented in applications such as ultra-fine patterning processes for single atomic layer devices consisting of new materials and the development of stretchable devices and reference materials for tonometer testing and standardization for glaucoma diagnosis. To achieve in-situ monitoring of ultra-fine processes, the team is planning to develop various optical measurement equipment such as new super-resolution microscopy technology with nm resolution. Furthermore, the team has established a strong collaboration network with relevant industries (device, equipment, sensors), medical institutions, and research centers to develop world-class laser process equipment.

Its current R&D project include the following subjects :

  • • Development of femtosecond laser-based ultra-precise nanoprocess equipment
  • • Development of in-situ optical measuring devices for high-speed, ultra-precise nanoprocesses
  • • Development of laser modulation super-resolution microscopy technology
  • • Development of imaging and spectroscopic analysis measurement technology for nanoprocesses and nanomaterials
  • • Development of patterning processes for single atomic layer devices made of new materials that cannot be patterned through wet processes
  • • Development of 3D patterning processes for nano-diamond tools and optical fiber
  • • Development of stretchable intraocular pressure measuring devices and RM process technology for glaucoma diagnosis
  • • Development of new intraocular pressure measurement principles based on RM process technology for intraocular pressure measurement

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Atom-scale Measurement Team

The Atom-scale Measurement Team aims to explore and understand the physical properties of substances down to the atomic scale through ultra-precise measurements. Active research includes scientific activities based on low-temperature UHV scanning tunneling microscopy, variable-temperature UHV atomic force microscopy, pump-probe picosecond laser spectroscopy, and theoretical studies using density functional theory. The team’s effort is also focused on the development of measurement technology using new principles and its improvement. In all of its endeavors, the team integrates theoretical predictions with the experimental research.

Its current R&D project include the following subjects :

  • • Development of micro-material property measurement technology based on ultra-high vacuum low-temperature scanning tunneling microscopes and ultra-high vacuum variable-temperature atomic force microscopes
  • • Research on the behavior and electronic structure of semiconductor impurity atoms
  • • Development of thermoelectric measurement technology for nanomaterial structure and electrical property measurements
  • • Electronic structure analysis based on density functional theory (DFT)

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Instrumentation Infrastructure Team

The Instrumentation Infrastructure Team works to engage in collaborative research to develop cutting-edge measuring devices by establishing instrumentation infrastructure and enhancing the technology. The team consists of experts from fields involving infrastructure vital for measuring devices, such as signal processing algorithms, instrumentation control center implementation and enhancement, instrument mechanism section design and manufacturing, and uncertainty-based measurement instrumentation performance evaluation. As such, the team aims to proactively meet demands for instrumentation development and enhancement.

Its current R&D project include the following subjects :

  • • Collaborative development of signal processing and standard specification algorithms for measuring devices
  • • Collaborative implementation of instrument control hardware/software and FPGA-based enhancement
  • • Collaborative efforts for instrument mechanism section design and manufacturing
  • • Collaborative development of standard performance testing procedures for measuring devices and collaborative uncertainty evaluation

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