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About Group

About Group

The Vacuum Materials Measurement Team develops measurement technology for materials based on vacuum environments for semiconductor/display industries. For our main research areas, we develop technology for the measurement of functional materials such as precursors and coating materials for semiconductor processes/equipment.

Current R&D Projects

  • 1 Vapour pressure measurement
  • 2 Thermal stability measurement
  • 3 Phase transition measurement
  • 4 Particle measurement

Recent R&D Highlights

  • Thermal stability measurement of precursor based on 2D Nuclear Magnetic Resonance(NMR) analysis.
  • Development of procedures for uncertainty of precursor property and production of reference standards (Reference standard 31 cases Production/Collection)

About Other Groups

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