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About Group
About Group
Vacuum Materials Measurement Team
The Vacuum Materials Measurement Team develops measurement technology for materials based on vacuum environments for semiconductor/display industries. For our main research areas, we develop technology for the measurement of functional materials such as precursors and coating materials for semiconductor processes/equipment.
Current R&D Projects
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1
Vapour pressure measurement
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2
Thermal stability measurement
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3
Phase transition measurement
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4
Particle measurement
Recent R&D Highlights
- Thermal stability measurement of precursor based on 2D Nuclear Magnetic Resonance(NMR) analysis.
- Development of procedures for uncertainty of precursor property and production of reference standards (Reference standard 31 cases Production/Collection)
About Other Groups
- Operando Methodology and Measurement Team
- Hyperspectral Nano-imaging Team
- EM Nanometrology Team
- Frontier of Extreme Physics Team
- Intelligent Wave Engineering Team
- Nanobiosensor Team
- Smart Devices Team
- Low-Dimensional Material Team
- Multiscale Mechanical Properties Measurement Team
- IoT Optical Sensor Team
- AI convergence technology development Team