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About Group

About Group

The EM Nanometrology Team’s goal is to develop electron microscopy-based measuring technologies and their standardization for low-dimensional materials, with a focus on the in-situ and operando nano-characterization. We expect to contribute to the development of key integrated-technologies necessary for emerging future industries.

Current R&D Projects

  • 1 Standardization of particle size and membrane thickness measurement
  • 2 Development of electron microscopy-based in-situ technique for electro-mechanical property measurement
  • 3 Development of in-situ AFM (AFM in SEM technique)
  • 4 Operando electron microscopy in liquid environments

Recent R&D Highlights

  • Development of a liquid TEM holder for fluid environments that can replace all parts related to liquid flow.
  • Development of a technology for manufacturing two-dimensional layered materials with bubble-free clean interfaces
  • SEM measurement of thicknesses of MoS2 and multilayered photonic crystal film

About Other Groups

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