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About Group
About Group
Fab Infra Team
Fab Infra Team
The Fab Infra Team is responsible for the management of the KRISS nanofab, providing researchers with various nanofab facilities and cleanroom environments for their successful development of Nano/Quantum devices. The team maintains the nanofab facilities, trains fab users and addresses safety issues. It also provides technical support for the fab users who need help in their device fabrication.
Current R&D Projects
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1
Maintenance of KRISS nanofab facilities and management of fab users
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2
Development of Nano/Quantum device fabrication processes
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3
Fabrication support for fab users
Recent R&D Highlights
- Optimization of ICP etching and Nb sputtering processes for quantum device fabrication.
- Optimization of E-beam lithography process for fabricating various ultra-fine nano structures.