The Laser Nanoprocess Instrumentation Team is working to develop femtosecond laser nanoprocess technology and equipment to develop high-speed laser-based nanoprocess equipment with high-precision, high-speed optical measurement instrumentation. In contrast to existing wet processes, femtosecond laser-based nanoprocesses can be implemented in applications such as ultra-fine patterning processes for single atomic layer devices consisting of new materials and the development of stretchable devices and reference materials for tonometer testing and standardization for glaucoma diagnosis. To achieve in-situ monitoring of ultra-fine processes, the team is planning to develop various optical measurement equipment such as new super-resolution microscopy technology with nm resolution. Furthermore, the team has established a strong collaboration network with relevant industries (device, equipment, sensors), medical institutions, and research centers to develop world-class laser process equipment.

Current R&D Projects

• 1 Development of in-situ optical measuring devices for high-speed, ultra-precise nanoprocesses
• 2 Development of laser modulation super-resolution microscopy technology
• 3 Development of imaging and spectroscopic analysis measurement technology for nanoprocesses and nanomaterials
• 4 Development of patterning processes for single atomic layer devices made of new materials that cannot be patterned through wet processes
• 5 Development of 3D patterning processes for nano-diamond tools and optical fiber
• 6 Development of stretchable intraocular pressure measuring devices and RM process technology for glaucoma diagnosis
• 7 Development of new intraocular pressure measurement principles based on RM process technology for intraocular pressure measurement

Recent R&D Highlights

• Development of technology for evaluating the pollutant inside soil with DreamBios
• International cooperation with Vietnam IMS to develop the TiO composite with carbon nano-materials

About Other Groups

• Surface Analysis Team
• Semiconductor Integrated Metrology Team
• Optical Imaging and Metrology Team
• Space Optics Team
• Scientific Instruments Performance Evaluation Team
• Atom-scale Measurement Team
• Instrumentation Infrastructure Team
• Climate Watch and Hydrogen quality Metrology Team
• Measurement Instrumentation and Data Verification Research Team